Patent Assignment
Reel/Frame 026121/0198
Assignment of Assignor's Interest
Recorded: 2011-04-13
Pages: 2
Assignor
CLARK, ROBERT D
Executed: 2011-03-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Forming Ultra-Shallow Doping Regions by Solid Phase Diffusion