Patent Assignment
Reel/Frame 026174/0993
Assignment of Assignor's Interest
Recorded: 2011-04-25
Pages: 3
Assignors
HSU, DUAN-FU STEPHEN
Executed: 2004-03-05
WAMPLER, KURT E.
Executed: 2004-03-03
EURLINGS, MARKUS FRANCISCUS ANTONIUS
Executed: 2004-03-18
CHEN, JANG FUNG
Executed: 2004-03-08
CORCORAN, NOEL
Executed: 2004-03-05
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Performing Model-Based Layout Conversion for Use with Dipole Illumination
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.