Patent Assignment
Reel/Frame 026234/0844
Re-Record to Change Correspondence Information of Assignment Recorded at Reel/Frame 027760/0938
Recorded: 2011-04-15
Pages: 10
Assignors
EHM, DIRK HEINRICH
Executed: 2009-03-09
MUELLENDER, STEPHAN
Executed: 2009-03-12
STEIN, THOMAS
Executed: 2009-03-12
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2009-03-10
WOLSCHRJIN, BASTIAAN THEODOOR
Executed: 2009-03-27
KRAUS, DIETER
Executed: 2009-04-02
VERSLUIS, RICHARD
Executed: 2009-03-26
MEIJERINK, MARCUS GERHARDUS HENDRIKUS
Executed: 2009-03-31
Assignees
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501, 5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Optical Arrangement, in Particular Projection Exposure Apparatus for Euv Lithography, as Well as Reflective Optical Element with Reduced Contamination
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 1, 2009
From: EHM, DIRK HEINRICH; MUELLENDER, STEPHAN; STEIN, THOMAS; MOORS, JOHANNES HUBERTUS JOSEPHINA
To: CARL ZEISS SMT AG; ASML NETHERLANDS B.V.
Reel/Frame 022760/0938 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →