Confirmatory License

Recorded: 2011-05-24 Pages: 2

Assignor

Executed: 2011-04-08

Assignee

NATIONAL SCIENCE FOUNDATION

4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230

Covered Property (1)

Multiple Oxidation Smoothing Method for Reducing Silicon Waveguide Roughness

Patent: 7,123,805 →

Application: 10/869,636 →

Publication: US 2005/0013575