Patent Assignment
Reel/Frame 026389/0304
Assignment of Assignor's Interest
Recorded: 2011-06-03
Pages: 2
Assignor
FISCHER, ANDREAS
Executed: 2006-02-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Selective Pre-Coating of a Plasma Processing Chamber