Assignment of Assignor's Interest

Recorded: 2011-06-07 Pages: 2

Assignor

MENGEL, MARKUS

Executed: 2011-05-24

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Method and Apparatus for Modifying a Substrate Surface of a Photolithographic Mask

Patent: 8,735,030 →

Application: 13/084,991 →

Publication: US 2011/0255065

Related Assignments (3)

Other recorded transfers of the patent in this record — the chain of ownership.