Patent Assignment
Reel/Frame 026401/0051
Assignment of Assignor's Interest
Recorded: 2011-06-07
Pages: 2
Assignor
OSHEMKOV, SERGEY
Executed: 2011-05-12
Assignee
CARL ZEISS SMS LTD.
44 MAALE CAMON, 21613 KARMIEL, ISRAEL
Covered Property
(1)
Method and Apparatus for Modifying a Substrate Surface of a Photolithographic Mask
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 7, 2011
From: MENGEL, MARKUS
To: CARL ZEISS SMT GMBH
Reel/Frame 026400/0983 →
Assignment of Assignor's Interest
Jun 7, 2011
From: KLAESGES, RALPH
To: CARL ZEISS SMS GMBH
Reel/Frame 026401/0001 →
Merger
Sep 19, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040069/0705 →