Patent Assignment
Reel/Frame 026409/0204
Assignment of Assignor's Interest
Recorded: 2011-06-08
Pages: 3
Assignors
HSU, DUAN-FU STEPHEN
Executed: 2007-08-17
PARK, SANGBONG
Executed: 2007-08-17
VAN DEN BROEKE, DOUGLAS
Executed: 2007-08-17
CHEN, JANG FUNG
Executed: 2007-08-21
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Performing Dark Field Double Dipole Lithography (DDL)
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.