Patent Assignment
Reel/Frame 026455/0012
Assignment of Assignor's Interest
Recorded: 2011-06-16
Pages: 5
Assignors
DEHE, ALFONS
Executed: 2011-06-10
BARZEN, STEFAN
Executed: 2011-06-10
FRIZA, WOLFGANG
Executed: 2011-06-15
KLEIN, WOLFGANG
Executed: 2011-06-10
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Method of Manufacturing a Semiconductor Device Comprising a Membrane Over a Substrate by Forming a Plurality of Features Using Local Oxidation Regions