Patent Assignment
Reel/Frame 026557/0680
Merger
Recorded: 2011-07-07
Pages: 5
Assignor
THERMA-WAVE, INC.
Executed: 2008-06-26
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95036
Covered Property
(1)
High Resolution Monitoring of Cd Variations
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.