Patent Assignment
Reel/Frame 026606/0637
Assignment of Assignor's Interest
Recorded: 2011-07-18
Pages: 2
Assignors
BOWERING, NORBERT R.
Executed: 2008-02-11
FOMENKOV, IGOR V.
Executed: 2008-02-11
KHODYKIN, OLEH V.
Executed: 2008-02-13
BYKANOV, ALEXANDER N.
Executed: 2008-02-12
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.