Patent Assignment
Reel/Frame 026657/0427
Assignment of Assignor's Interest
Recorded: 2011-07-27
Pages: 3
Assignor
NAKANO, AKINORI
Executed: 2011-07-27
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method for Reducing Dielectric Constant of Film Using Direct Plasma of Hydrogen