Patent Assignment
Reel/Frame 026765/0905
Assignment of Assignor's Interest
Recorded: 2011-08-17
Pages: 2
Assignor
CHEN, FENG
Executed: 2011-08-04
Assignee
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANG JIANG ROAD, PUDONG NEW AREA, SHANGHAI, 201203, CHINA
Covered Property
(1)
Cleaning Device and a Cleaning Method of a Fixed Abrasives Polishing Pad