Patent Assignment
Reel/Frame 026807/0506
Assignment of Assignor's Interest
Recorded: 2011-08-25
Pages: 7
Assignors
ISHIBASHI, KIYOHISA
Executed: 2011-07-14
MORIYA, ATSUSHI
Executed: 2011-07-15
NODA, TAKAAKI
Executed: 2011-07-15
MAEDA, KIYOHIKO
Executed: 2011-07-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOYKO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.