Patent Assignment
Reel/Frame 026808/0976
Assignment of Assignor's Interest
Recorded: 2011-08-25
Pages: 5
Assignors
TACHIBANA, HIROYUKI
Executed: 2011-07-12
MURATA, KAZUTOSHI
Executed: 2011-07-04
MIYATAKE, NAOMASA
Executed: 2011-07-07
MORI, YASUNARI
Executed: 2011-07-05
Assignee
MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
6-4, TSUKIJI 5-CHOME, CHUO-KU, TOKYO, 104-8439, JAPAN
Covered Property
(1)
Atomic Layer Deposition Apparatus