Patent Assignment
Reel/Frame 026821/0530
Assignment of Assignor's Interest
Recorded: 2011-08-29
Pages: 3
Assignor
PATRA, MICHAEL
Executed: 2011-08-22
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Method, Projection Exposure Apparatus, Laser Radiation Source and Bandwidth Narrowing Module for a Laser Radiation Source