Patent Assignment
Reel/Frame 026844/0977
Assignment of Assignor's Interest
Recorded: 2011-09-01
Pages: 3
Assignors
SHAO, YAN
Executed: 2011-08-31
TABAT, MARTIN D.
Executed: 2011-08-31
OLSEN, CHRISTOPHER K.
Executed: 2011-08-31
MACCRIMMON, RUAIRIDH
Executed: 2011-08-31
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTAINING MATERIALS
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.