Patent Assignment
Reel/Frame 026846/0604
Assignment of Assignor's Interest
Recorded: 2011-09-01
Pages: 2
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Gas Cluster Ion Beam Etch Profile Control Using Beam Divergence
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.