Patent Assignment
Reel/Frame 026882/0593
Assignment of Assignor's Interest
Recorded: 2011-09-09
Pages: 3
Assignors
OTA, YOSUKI
Executed: 2011-07-29
HIROSE, YOSHIRO
Executed: 2011-07-29
AKAE, NAONORI
Executed: 2011-07-29
TAKASAWA, YUSHIN
Executed: 2011-07-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.