Patent Assignment
Reel/Frame 026912/0132
Assignment of Assignor's Interest
Recorded: 2011-09-15
Pages: 5
Assignor
DELPHI TECHNOLOGIES, INC.
Executed: 2011-06-24
Assignee
GOOGLE INC.
1600 AMPHITHEATRE PARKWAY, MOUNTAIN VIEW, CALIFORNIA, 94043
Covered Property
(1)
Deep Reactive Ion Etching Process and Microelectromechanical Devices Formed Thereby
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.