Patent Assignment
Reel/Frame 027005/0316
Assignment of Assignor's Interest
Recorded: 2011-10-03
Pages: 3
Assignors
NEMANI, SRINIVAS D.
Executed: 2011-08-03
ZHOU, YIFENG
Executed: 2011-08-03
LUBOMIRSKY, DMITRY
Executed: 2011-08-03
YIEH, ELLIE
Executed: 2011-08-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Patterning a Low-K Dielectric Film