Patent Assignment
Reel/Frame 027080/0916
Assignment of Assignor's Interest
Recorded: 2011-10-18
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Using Vacuum Ultra-Violet (VUV) Data in Radio Frequency (RF) Sources