Patent Assignment
Reel/Frame 027105/0973
Assignment of Assignor's Interest
Recorded: 2011-10-24
Pages: 2
Assignors
TAYA, ATSUSHI
Executed: 2011-10-13
KANAMORI, KATSUHIKO
Executed: 2011-10-13
TOTOKAWA, MASASHI
Executed: 2011-10-13
Assignee
DENSO CORPORATION
1-1, SHOWA-CHO, KARIYA-CITY, AICHI-PREF., 448-8661, JAPAN
Covered Property
(1)
A Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer