Patent Assignment
Reel/Frame 027250/0661
Assignment of Assignor's Interest
Recorded: 2011-11-18
Pages: 9
Assignors
AKAO, TOKUNOBU
Executed: 2011-09-26
OGAWA, UNRYU
Executed: 2011-09-26
OKUNO, MASAHISA
Executed: 2011-09-26
YASHIMA, SHINJI
Executed: 2011-09-26
UMEKAWA, ATSUSHI
Executed: 2011-09-26
MINAMI, KAICHIRO
Executed: 2011-09-26
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.