Patent Assignment
Reel/Frame 027321/0890
Assignment of Assignor's Interest
Recorded: 2011-12-05
Pages: 2
Assignor
SEITZ, HOLGER
Executed: 2011-11-02
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Characterizing a Feature on a Mask and Device for Carrying Out the Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.