Patent Assignment
Reel/Frame 037155/0274
Merger
Recorded: 2015-11-24
Pages: 5
Assignor
CARL ZEISS SMS GMBH
Executed: 2015-04-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Characterizing a Feature on a Mask and Device for Carrying Out the Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.