Patent Assignment
Reel/Frame 027404/0502
Assignment of Assignor's Interest
Recorded: 2011-12-16
Pages: 2
Assignor
NGUYEN, TUE
Executed: 2011-12-16
Assignee
TEGAL CORPORATION
2201 S. MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954
Covered Property
(1)
Multilayer Copper Structure for Improving Adhesion Property
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.