Patent Assignment
Reel/Frame 027434/0078
Assignment of Assignor's Interest
Recorded: 2011-12-22
Pages: 4
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Positioning System, a Lithographic Apparatus and a Method for Positional Control