Patent Assignment
Reel/Frame 027531/0053
Assignment of Assignor's Interest
Recorded: 2012-01-13
Pages: 3
Assignee
TOKUYAMA CORPORATION
1-1, MIKAGE-CHO, SHUNAN-SHI, YAMAGUCHI, 745-0053, JAPAN
Covered Property
(1)
Resist Pattern Forming Method and Developer