Assignment of Assignor's Interest

Recorded: 2012-01-23 Pages: 3

Assignors

SATO, JUN

Executed: 2011-12-22

HASEGAWA, MASAYUKI

Executed: 2012-01-06

Assignee

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Slimming Method of Carbon-Containing Thin Film and Oxidation Apparatus

Patent: 8,703,000 →

Application: 13/330,004 →

Publication: US 2012/0156888