Patent Assignment
Reel/Frame 027621/0732
Assignment of Assignor's Interest
Recorded: 2012-01-31
Pages: 2
Assignor
ARNZ, MICHAEL
Executed: 2012-01-17
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Determining the Registration of a Structure on a Photomask and Apparatus to Perform the Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 31, 2012
From: SEIDEL, DIRK
To: CARL ZEISS SMS GMBH
Reel/Frame 027621/0760 →
Assignment of Assignor's Interest
Jan 31, 2012
From: KLOSE, GERD
To: CARL ZEISS MEDITEC AG
Reel/Frame 027621/0784 →
Merger
Sep 19, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040069/0705 →