Patent Assignment
Reel/Frame 027621/0784
Assignment of Assignor's Interest
Recorded: 2012-01-31
Pages: 2
Assignor
KLOSE, GERD
Executed: 2012-01-25
Assignee
CARL ZEISS MEDITEC AG
GOESCHWITZER-STR. 51-52, JENA, 07745, GERMANY
Covered Property
(1)
Method for Determining the Registration of a Structure on a Photomask and Apparatus to Perform the Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 31, 2012
From: ARNZ, MICHAEL
To: CARL ZEISS SMT GMBH
Reel/Frame 027621/0732 →
Assignment of Assignor's Interest
Jan 31, 2012
From: SEIDEL, DIRK
To: CARL ZEISS SMS GMBH
Reel/Frame 027621/0760 →
Merger
Sep 19, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040069/0705 →