Patent Assignment
Reel/Frame 027675/0810
Assignment of Assignor's Interest
Recorded: 2012-02-06
Pages: 4
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Light Source Optimizing Method, Exposure Method, Device Manufacturing Method, Program, Exposure Apparatus, Lithography System, Light Source Evaluation Method, and Light Source Modulation Method