Patent Assignment
Reel/Frame 027743/0832
Assignment of Assignor's Interest
Recorded: 2012-02-22
Pages: 4
Assignors
MORIYA, MASATO
Executed: 2012-02-15
HAYASHI, HIDEYUKI
Executed: 2012-02-15
WAKABAYASHI, OSAMU
Executed: 2012-02-15
Assignee
GIGAPHOTON INC
400 YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-0819, JAPAN
Covered Property
(1)
System and Method for Generating Extreme Ultraviolet Light