Patent Assignment
Reel/Frame 027868/0224
Assignment of Assignor's Interest
Recorded: 2012-03-15
Pages: 3
Assignor
CHANG, YA HUI
Executed: 2012-01-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Device and Methods for Forming Partially Self-Aligned Trenches