Patent Assignment
Reel/Frame 027898/0080
Assignment of Assignor's Interest
Recorded: 2012-03-21
Pages: 3
Assignor
HANSEN, STEVE
Executed: 2008-03-05
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Predicting Line Width Roughness and Resist Pattern Failure and the Use Thereof in a Lithography Simulation Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.