Patent Assignment
Reel/Frame 032173/0275
Assignment of Assignor's Interest
Recorded: 2014-02-07
Pages: 18
Assignor
ASML MASKTOOLS B.V.
Executed: 2013-12-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Properties
(8)
Hybrid phase shift mask providing improved optical proximity correction capabilities and a method of forming the same
Application:
09/562,443 →
Optical proximity correction method utilizing serifs having variable dimensions
Application:
09/592,653 →
Source and mask optimization by changing intensity and shape of the illumination source
Application:
10/813,626 →
Publication:
US 2004/0265707
Source and Mask Optimization by Changing Intensity and Shape of the Illumination Source and Magnitude and Phase of Mask Diffraction Orders
Method, Program Product and Apparatus for Performing Double Exposure Lithography
Method, Program Product and Apparatus for Model Based Geometry Decomposition for Use in a Multiple Exposure Process
Method, program product and apparatus for creating optimal test patterns for optical model calibration and for selecting suitable calibration test patterns from an arbitrary layout
Method, Program Product and Apparatus for Predicting Line Width Roughness and Resist Pattern Failure and the Use Thereof in a Lithography Simulation Process
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 15, 2000
From: CHEN, J. FUNG; CALDWELL, ROGER; LAIDIG, TOM; WAMPLER, KURT E.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 011181/0420 →
Assignment of Assignor's Interest
Oct 24, 2000
From: LAIDIG, THOMAS; WAMPLER, KURT E.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 011292/0507 →
Assignment of Assignor's Interest
Aug 31, 2004
From: SOCHA, ROBERT
To: ASML MASKTOOLS B.V.
Reel/Frame 015744/0582 →
Assignment of Assignor's Interest
Nov 28, 2007
From: TEJNIL, EDITA
To: ASML MASKTOOLS B.V.
Reel/Frame 020190/0146 →
Assignment of Assignor's Interest
Feb 28, 2012
From: CHEN, JANG FUNG; HSU, DUAN-FU STEPHEN; VAN DEN BROEKE, DOUGLAS
To: ASML MASKTOOLS B.V.
Reel/Frame 027776/0900 →
Assignment of Assignor's Interest
Mar 21, 2012
From: HANSEN, STEVE
To: ASML MASKTOOLS B.V.
Reel/Frame 027898/0080 →