Patent Application
Utility
App. No. 10/813,626
· Confirmation No. 3814
Source and mask optimization by changing intensity and shape of the illumination source
Inventor:
Robert Socha
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-12-18 | ABN |
Abandonment | 2 | View | |
| 2008-09-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-09-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-08-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-08-26 | PA.. |
Power of Attorney | 1 | View | |
| 2008-08-26 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2008-08-15 | N572 |
Response - Re: Informal Power of Attorney (PTOL-308) | 1 | View | |
| 2008-08-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-08-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-08-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-08-05 | PA.. |
Power of Attorney | 3 | View | |
| 2008-04-14 | CTFR |
Final Rejection | 8 | View | |
| 2008-04-14 | 892 |
List of references cited by examiner | 1 | View | |
| 2008-04-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2008-04-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2008-03-14 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-03-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-03-14 | FOR |
Foreign Reference | 40 | View | |
| 2008-01-28 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2008-01-28 | SPEC |
Specification | 1 | View | |
| 2008-01-28 | CLM |
Claims | 16 | View | |
| 2008-01-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2008-01-28 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2008-01-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-01-28 | FOR |
Foreign Reference | 9 | View | |
| 2008-01-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-01-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-01-28 | XT/ |
Extension of Time | 1 | View | |
| 2008-01-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-09-27 | CTNF |
Non-Final Rejection | 6 | View | |
| 2007-09-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-09-27 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2007-09-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-09-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2007-07-19 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2007-07-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-07-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-06-19 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2007-06-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-06-19 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2005-05-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2005-03-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2005-03-29 | FOR |
Foreign Reference | 23 | View | |
| 2004-12-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-12-06 | FWCLM |
Index of Claims | 1 | View | |
| 2004-08-16 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 4 | View | |
| 2004-08-16 | OATH |
Oath or Declaration filed | 2 | View | |
| 2004-06-15 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2004-03-31 | TRNA |
Transmittal of New Application | 1 | View | |
| 2004-03-31 | SPEC |
Specification | 37 | View | |
| 2004-03-31 | CLM |
Claims | 16 | View | |
| 2004-03-31 | ABST |
Abstract | 1 | View | |
| 2004-03-31 | DRW |
Drawings-only black and white line drawings | 32 | View | |
| 2004-03-31 | FRPR |
Certified Copy of Foreign Priority Application | 1 | View |
Inventors
Robert Socha
Campbell, CA
Attorneys & Agents of Record
Classification
USPC
355/67
G06T7/001
G03F7/70091
G03F7/70125
G03F7/70425
G03F7/70433
G03F7/705
Prosecution
- Examiner
- LIU, CHIA HOW MICHAEL
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- 55071-351
- Confirmation No.
- 3814
Publication
- Pub. No.
- US20040265707A1
- Pub. Date
- 2004-12-30
Parent
Claims priority from a provisional application
→
App. 60/458,365
Filed 2003-03-31
· Provisional Application Expired
Child
is a Division of
→
App. 12/186,410
· US 7,864,301
Filed 2008-08-05
· Patented Case
Child
is a Division of
→
App. 12/962,522
· US 8,730,452
Filed 2010-12-07
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 14/281,539
· US 10,657,641
Filed 2014-05-19
· Patented Case
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 10/813,626
- Filed
- 2004-03-31
- Pub. No.
- US20040265707A1
- Examiner
- LIU, CHIA HOW MICHAEL
- Art Unit
- 2851
External Links