Assignment of Assignor's Interest

Recorded: 2004-08-31 Pages: 2

Assignor

SOCHA, ROBERT

Executed: 2004-08-18

Assignee

ASML MASKTOOLS B.V.

P.O. BOX 324, AH VELDHOVEN, 5500, NETHERLANDS

Covered Property (1)

Source and mask optimization by changing intensity and shape of the illumination source

Application: 10/813,626 →

Publication: US 2004/0265707

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.