Patent Assignment
Reel/Frame 028013/0209
Assignment of Assignor's Interest
Recorded: 2012-04-09
Pages: 3
Assignor
SILOVA, MARIANNA YURYEVNA
Executed: 2012-01-30
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Reflective Optical Components for Lithographic Apparatus and Device Manufacturing Method