Reflective optical components for lithographic apparatus and device manufacturing method
A reflective optical component is configured to reflect EUV radiation. The reflective optical component has a reflective layer with a bimetal cap layer of differing first and second metals selected to ensure that the outer surface of the cap layer is substantially unreactive or non-adsorptive to sulfur. The bimetal cap layer may be an alloy of the two metals or may consist of a base layer of the first metal deposited on the reflective layer and a surface layer of the second metal on the base layer. The interaction of the two metals may lead to modification of the bonding energy to the outer face of the cap layer of sulfur-containing molecules such as SO 2 so that sulfur adsorption, which leads to loss of reflectivity, is reduced or eliminated.
1. A reflective optical component configured to reflect EUV radiation, the reflective optical component comprising:
a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal.
2. The reflective optical component according to claim 1 , wherein the surface layer is substantially a monolayer of the second metal.
3. The reflective optical component according to claim 1 , wherein the bimetal cap layer has a thickness of 4 nm or less.
4. The reflective optical component according to claim 1 , wherein the first metal is selected from the group consisting of: ruthenium, rhodium, palladium, titanium, and zirconium.
5. The reflective optical component according to claim 1 , wherein the second metal is selected from the group consisting of: ruthenium, rhodium, palladium, titanium, and zirconium.
6. The reflective optical component according to claim 1 , wherein the reflective layer comprises alternating layers of molybdenum or diamond-like carbon, and silicon.
7. The reflective optical component according to claim 1 , wherein the first metal is titanium and the second metal is ruthenium.
8. The reflective optical component according to claim 1 , wherein the first metal is palladium and the second metal is rhodium.
9. The reflective optical component according to claim 1 , wherein the first metal is palladium and the second metal is zirconium.
10. The reflective optical component according to claim 1 , wherein distortions to packing and interatomic spacings of the second metal in the surface layer due to matched lattice spacings to the base layer of the first metal cause modification of bond energy of the second metal at the outer surface, leading to weaker adsorption of the sulfur compounds.
11. A reflective optical component configured to reflect EUV radiation, the reflective optical component comprising:
a reflective layer having a cap layer deposited on and in contact with the reflective layer, wherein the cap layer is an alloy of a first metal and a second metal, the second metal being different from the first metal, configured to render an outer surface of the cap layer substantially unreactive to sulfur compounds, wherein a molar ratio of the first metal to the second metal in the alloy is from 3:1 to 1:3.
12. A reflective optical component configured to reflect EUV radiation, the reflective optical component comprising:
a reflective layer; and
a bimetal cap layer deposited on and in contact with the reflective layer, the bimetal cap layer comprising:
a base layer of a first metal selected from the group consisting of ruthenium, rhenium and palladium, titanium, and zirconium deposited on and in contact with the reflective layer; and
a surface layer of a second metal deposited on and in contact with the base layer, wherein the second layer comprises fewer than 5 monolayers of the second metal, creating an outer face of the surface layer having a lower adsorption coefficient for sulfur than a surface of the first metal.
13. A lithographic apparatus comprising:
an illumination system configured to condition an EUV radiation beam;
a support constructed to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
a substrate table constructed to hold a substrate;
a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and
a reflective optical component configured to reflect EUV radiation, the reflective optical component comprising a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal is being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal.
14. A lithographic projection apparatus arranged to project a pattern of EUV radiation from a patterning device onto a substrate, wherein the lithographic projection apparatus comprises a reflective optical component configured to reflect EUV radiation, the reflective optical component comprising a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal is being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal is being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal.
15. An illumination apparatus for EUV lithography, arranged to condition an EUV radiation beam, wherein the illumination apparatus comprises a reflective optical component configured to reflect EUV radiation, the reflective optical component comprising a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal is being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal.
16. An EUV source suitable for EUV lithography comprising one or more reflective optical components configured to reflect EUV radiation, the reflective optical component comprising a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal.
17. A device manufacturing method comprising:
reflecting an EUV radiation beam with a reflective optical component configured to reflect EUV radiation, the reflective optical component comprising a reflective layer having a bimetal cap layer thereon, the bimetal cap layer comprising a base layer of a first metal deposited on and in contact with the reflective layer and a surface layer of a second metal, different from the first metal, deposited on and in contact with the base layer, wherein an outer surface of the cap layer is substantially unreactive to sulfur compounds by the first metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, titanium, zirconium, and niobium, the second metal being selected from the group consisting of: ruthenium, rhodium, palladium, osmium, iridium, scandium, titanium, vanadium, manganese, zirconium, titanium, niobium, molybdenum, tungsten, and rhenium, and the surface layer comprising fewer than 5 monolayers of the second metal; and
projecting a patterned EUV radiation beam onto a substrate.