Patent Assignment
Reel/Frame 028014/0422
Assignment of Assignor's Interest
Recorded: 2012-04-09
Pages: 4
Assignor
BYUN, CHUL SOO
Executed: 2012-03-29
Assignees
PIEZONICS CO., LTD.
35-3, HONGCHEON-RI, IPJANG-MYEON, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 331-825, KOREA, REPUBLIC OF
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
35-3, HONGCHEON-RI, IPJANG-MYEON, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 331-825, KOREA, REPUBLIC OF
Covered Properties
(3)
Method and Apparatus for Chemical Vapor Deposition Capable of Preventing Contamination and Enhancing Film Growth Rate
Method for Chemical Vapor Deposition Capable of Preventing Contamination and Enhancing Film Growth Rate
Apparatus for Chemical Vapor Deposition (Cvd) with Showerhead
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.