Patent Assignment
Reel/Frame 028037/0100
Assignment of Assignor's Interest
Recorded: 2012-04-12
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method and Storage Medium