Plasma etching method and storage medium
Disclosed is a plasma etching method capable of carrying out an etching process while preventing an etching shape defect such as a bowing from occurring. The plasma etching method includes etching an organic film formed on the substrate to a middle depth using an inorganic film as a mask by generating plasma between an upper electrode a surface of which is formed with a silicon containing material and a lower electrode where a substrate to be processed is placed thereon in a processing chamber; forming a protective film including the silicon containing material of the upper electrode on a side wall of an etching region formed from the etching process by applying a negative DC voltage on the upper electrode while generating the plasma; and continuing the etching process using the plasma thereby etching the organic film to a predetermined depth.
1. A plasma etching method using a plasma etching apparatus comprising:
etching an organic film formed on a substrate to be processed to a middle depth using an inorganic film as a mask by generating plasma between an upper electrode a surface of which is formed with a silicon containing material and a lower electrode where the substrate is placed thereon in a processing chamber;
after the etching process, forming a protective film including the silicon containing material of the upper electrode on a side wall of an etching region formed from the etching step by applying a negative DC voltage on the upper electrode while generating the plasma; and
after the forming process, continuing the etching process using the plasma thereby etching the organic film to a predetermined depth.
2. The plasma etching method of claim 1 , wherein the etching process and the continuing process are performed by using an O 2 containing gas as a plasma generating gas.
3. The plasma etching method of claim 1 , wherein the forming process and the continuing process are repeatedly performed in plural times.
4. The plasma etching method of claim 1 , further comprising determining a depth position of an etching shape defect in advance to perform the forming process at the timing corresponding to the depth position.
5. The plasma etching method of claim 1 , wherein the forming process is performed by using plasma containing H 2 gas.
6. The plasma etching method of claim 5 , wherein the plasma used in the forming process further includes a fluorine containing gas.
7. The plasma etching method of claim 1 , further comprising:
after the forming process, processing the substrate by using plasma including a fluorine containing gas.
8. A non-transitory computer-readable storage medium storing a computer executable program that, when executed, causes a computer to control a plasma etching apparatus to perform a plasma etching method comprising:
etching an organic film formed on the substrate to a middle depth using an inorganic film as a mask by generating plasma between an upper electrode a surface of which is formed with a silicon containing material and a lower electrode where a substrate to be processed is placed thereon in a processing chamber;
after the etching process, forming a protective film including the silicon containing material of the upper electrode on a side wall of an etching region formed from the etching step by applying a negative DC voltage on the upper electrode while generating the plasma; and
after the forming process, continuing the etching process using the plasma thereby etching the organic film to a predetermined depth.