Patent Assignment
Reel/Frame 028037/0192
Assignment of Assignor's Interest
Recorded: 2012-04-12
Pages: 3
Assignor
SUGAWARA, EIICHI
Executed: 2012-03-30
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus