Patent Assignment
Reel/Frame 028093/0062
Assignment of Assignor's Interest
Recorded: 2012-04-24
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and Method of Manufacturing Device