Patent Assignment
Reel/Frame 028165/0663
Assignment of Assignor's Interest
Recorded: 2012-05-07
Pages: 6
Assignors
LIN, CHUNG-YI
Executed: 2012-05-03
YANG, JIING-FENG
Executed: 2012-05-03
HUANG, TZU-HAO
Executed: 2012-05-03
HSIEH, CHIH-HAO
Executed: 2012-05-03
CHEN, DIAN-HAU
Executed: 2012-05-03
CHEN, HSING-LIN
Executed: 2012-05-03
KAO, KO-BIN
Executed: 2012-05-03
CHENG, YUNG-SHIH
Executed: 2012-05-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods of Patterning Small via Pitch Dimensions