Patent Assignment
Reel/Frame 028186/0517
Assignment of Assignor's Interest
Recorded: 2012-05-09
Pages: 4
Assignors
HARADA, KOICHIRO
Executed: 2012-04-13
MICHITA, NORIAKI
Executed: 2012-04-13
UEDA, TATSUSHI
Executed: 2012-04-13
SATO, TAKAYUKI
Executed: 2012-04-13
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, Method for Processing Substrates
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.