Patent Assignment
Reel/Frame 028311/0094
Assignment of Assignor's Interest
Recorded: 2012-06-04
Pages: 5
Assignors
BAHLKE, MATTHIAS ERHARD
Executed: 2012-05-14
BALDO, MARC A.
Executed: 2012-05-14
MENDOZA, HIROSHI ANTONIO
Executed: 2012-05-15
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Method of Lift-Off Patterning Thin Films in Situ Employing Phase Change Resists
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.