Patent Assignment
Reel/Frame 028318/0949
Assignment of Assignor's Interest
Recorded: 2012-06-05
Pages: 3
Assignors
KAZUMI, HIDEYUKI
Executed: 2006-05-18
SANO, AKIHIRO
Executed: 2006-05-19
MAKINO, AKITAKA
Executed: 2006-07-28
TAMURA, HITOSHI
Executed: 2006-07-28
SAKAGUCHI, MASAMICHI
Executed: 2006-07-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.